• DocumentCode
    472942
  • Title

    3-Dimensional Gate Array with Vertically Stacked Dual SOI/CMOS Structure Fabricated by Beam Recrystallization

  • Author

    Kawamura, S. ; Sasaki, N. ; Iwai, T. ; Mukai, R. ; Nakano, M. ; Takagi, M.

  • Author_Institution
    IC Development Division, Fujitsu Limited Kawasaki 211, Japan
  • fYear
    1984
  • fDate
    10-12 Sept. 1984
  • Firstpage
    44
  • Lastpage
    45
  • Keywords
    CMOS integrated circuits; CMOS technology; Fabrication; Insulation; Isolation technology; Large scale integration; Ring oscillators; Silicon on insulator technology; Three-dimensional integrated circuits; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 1984. Digest of Technical Papers. Symposium on
  • Conference_Location
    San Diego, CA, USA
  • Print_ISBN
    4-930813-08-5
  • Type

    conf

  • Filename
    4480691
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=472942