DocumentCode
472947
Title
Characterization of Bipolar Transistors with Polysilicon Emitter Contacts
Author
Patton, Gary L. ; Bravman, Jolhn C. ; Plummer, James D.
Author_Institution
Integrated Circuits Laboratory Stanford University, Stanford, CA 9430
fYear
1984
fDate
10-12 Sept. 1984
Firstpage
54
Lastpage
55
Keywords
Bipolar transistors; Chemicals; Electric variables; Electron emission; Silicon; Substrates; Surface cleaning; Surface treatment; Thickness measurement; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1984. Digest of Technical Papers. Symposium on
Conference_Location
San Diego, CA, USA
Print_ISBN
4-930813-08-5
Type
conf
Filename
4480696
Link To Document