• DocumentCode
    472947
  • Title

    Characterization of Bipolar Transistors with Polysilicon Emitter Contacts

  • Author

    Patton, Gary L. ; Bravman, Jolhn C. ; Plummer, James D.

  • Author_Institution
    Integrated Circuits Laboratory Stanford University, Stanford, CA 9430
  • fYear
    1984
  • fDate
    10-12 Sept. 1984
  • Firstpage
    54
  • Lastpage
    55
  • Keywords
    Bipolar transistors; Chemicals; Electric variables; Electron emission; Silicon; Substrates; Surface cleaning; Surface treatment; Thickness measurement; Tunneling;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 1984. Digest of Technical Papers. Symposium on
  • Conference_Location
    San Diego, CA, USA
  • Print_ISBN
    4-930813-08-5
  • Type

    conf

  • Filename
    4480696