DocumentCode

472950

Title

Image Enhancement in High-Resoltuion Lithography Through Polymer Grafting Techniques

Author

Steckl, A.J. ; Moore, J.A. ; Corelli, J.C. ; Liu, W.T.

Author_Institution

Center for Integrated Electronics Rensselaer Polytechnic Institute Troy, NY 12181

fYear

1984

fDate

10-12 Sept. 1984

Firstpage

60

Lastpage

61

Keywords

Image enhancement; Ion beams; Laboratories; Lithography; Polymers; Protons; Resists; Scanning electron microscopy; Throughput; X-ray imaging;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1984. Digest of Technical Papers. Symposium on

Conference_Location

San Diego, CA, USA

Print_ISBN

4-930813-08-5

Type

conf

Filename

4480699