Title :
An Electronic Digital Vernier for Process Evaluation
Author :
Adams, Richard F. ; Richling, Wayne P.
Author_Institution :
Hewlett-Packard Company Corvallis, Oregon 97330
Keywords :
Circuit testing; Condition monitoring; Conductors; Contacts; Decoding; Digital integrated circuits; Etching; Fabrication; Size measurement; System testing;
Conference_Titel :
VLSI Technology, 1984. Digest of Technical Papers. Symposium on
Conference_Location :
San Diego, CA, USA
Print_ISBN :
4-930813-08-5
