DocumentCode
472951
Title
An Electronic Digital Vernier for Process Evaluation
Author
Adams, Richard F. ; Richling, Wayne P.
Author_Institution
Hewlett-Packard Company Corvallis, Oregon 97330
fYear
1984
fDate
10-12 Sept. 1984
Firstpage
62
Lastpage
63
Keywords
Circuit testing; Condition monitoring; Conductors; Contacts; Decoding; Digital integrated circuits; Etching; Fabrication; Size measurement; System testing;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1984. Digest of Technical Papers. Symposium on
Conference_Location
San Diego, CA, USA
Print_ISBN
4-930813-08-5
Type
conf
Filename
4480700
Link To Document