Characterization of Intrinsic Capacitances of Small-Geometry MOSFET´s

Author

Sheu, B.J. ; Ko, P.K. ; Hsu, F.-C.

Author_Institution

University of California. Berkeley, Ca 94E720

fYear

1984

fDate

10-12 Sept. 1984

Firstpage

Lastpage

Keywords

Capacitance measurement; Circuits; Geometry; Laboratories; MOSFETs; Parasitic capacitance; Probes; Testing; Very large scale integration; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1984. Digest of Technical Papers. Symposium on

Conference_Location

San Diego, CA, USA

Print_ISBN

4-930813-08-5

Type

Filename

4480709

Link To Document