Title :
The longitudinal composition distribution of HgCdTe film grown by LPE
Author :
Shi, YanLi ; Yu, Lianjie ; Zhuang, JiSheng ; Yao, Ying ; Tian, Ying
Author_Institution :
Kunming Inst. of Phys., Yunnan
Abstract :
Electron energy spectrum of scanning electron microscope (SEM), infrared transmission spectroscopy measurement and Auger energy spectroscopy measurement were used to analyze the longitudinal composition distribution of HgCdTe film grown by liquid phase epitaxy (LPE). Two different distribution profiles were determined for the three metrical ways, theoretical explanations for the diverse results were proposed to explore which measurement is better for longitudinal composition analyses. In addition to this, comparison of measured results of as-grown LPE HgCdTe film with the published experimental result was also confirmed to show the correct composition distribution along growing direction, further influences of longitudinal composition distribution on the performance of HgCdTe focal plane array (FPA) detectors were discussed.
Keywords :
Auger electron spectroscopy; II-VI semiconductors; cadmium compounds; focal planes; infrared detectors; liquid phase epitaxial growth; mercury compounds; scanning electron microscopy; Auger energy spectroscopy; HgCdTe; SEM; electron energy spectrum; focal plane array detectors; infrared transmission spectroscopy; liquid phase epitaxy; longitudinal composition distribution; scanning electron microscope; Composite materials; Electrons; Energy measurement; Infrared spectra; Mercury (metals); Photonic band gap; Spectroscopy; Substrates; Tellurium; Thickness measurement;
Conference_Titel :
Infrared and Millimeter Waves, 2007 and the 2007 15th International Conference on Terahertz Electronics. IRMMW-THz. Joint 32nd International Conference on
Conference_Location :
Cardiff
Print_ISBN :
978-1-4244-1438-3
DOI :
10.1109/ICIMW.2007.4516624