DocumentCode
474293
Title
Differential Piezoresistive Pressure Sensor
Author
Firtat, B. ; Moldovan, C. ; Iosub, R. ; Necula, D. ; Nisulescu, M.
Author_Institution
Nat. Inst. for R&D in Microtechnologies, Bucharest
Volume
1
fYear
2007
fDate
Oct. 15 2007-Sept. 17 2007
Firstpage
87
Lastpage
90
Abstract
The pressure microsensor presented in this paper is based on a thin, elastic membrane, with boron implanted piezoresistive elements included, positioned in the maximum mechanical stress areas on the membrane. The pressure range for the developed sensors is in the 0divide400 mbar range, and this is the main novelty of this device. The optimized design and technological steps offer high efficiency, sensitivity and reliability to the developed pressure sensor.
Keywords
boron; membranes; piezoresistive devices; pressure sensors; stress analysis; boron; differential piezoresistive pressure sensor; maximum mechanical stress; thin elastic membrane; Biomembranes; Conductivity; Mechanical sensors; Micromechanical devices; Microsensors; Piezoresistance; Resistors; Silicon; Temperature sensors; Thermal stresses; micromachining; piezoresistive membrane; pressure sensor;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2007. CAS 2007. International
Conference_Location
Sinaia
ISSN
1545-827X
Print_ISBN
978-1-4244-0847-4
Type
conf
DOI
10.1109/SMICND.2007.4519653
Filename
4519653
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