Title :
Differential Piezoresistive Pressure Sensor
Author :
Firtat, B. ; Moldovan, C. ; Iosub, R. ; Necula, D. ; Nisulescu, M.
Author_Institution :
Nat. Inst. for R&D in Microtechnologies, Bucharest
fDate :
Oct. 15 2007-Sept. 17 2007
Abstract :
The pressure microsensor presented in this paper is based on a thin, elastic membrane, with boron implanted piezoresistive elements included, positioned in the maximum mechanical stress areas on the membrane. The pressure range for the developed sensors is in the 0divide400 mbar range, and this is the main novelty of this device. The optimized design and technological steps offer high efficiency, sensitivity and reliability to the developed pressure sensor.
Keywords :
boron; membranes; piezoresistive devices; pressure sensors; stress analysis; boron; differential piezoresistive pressure sensor; maximum mechanical stress; thin elastic membrane; Biomembranes; Conductivity; Mechanical sensors; Micromechanical devices; Microsensors; Piezoresistance; Resistors; Silicon; Temperature sensors; Thermal stresses; micromachining; piezoresistive membrane; pressure sensor;
Conference_Titel :
Semiconductor Conference, 2007. CAS 2007. International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-0847-4
DOI :
10.1109/SMICND.2007.4519653
