• DocumentCode
    474305
  • Title

    Simulation and Design of a Microcantilever for Biosensing Application

  • Author

    Ion, M. ; Pachiu, C. ; Moldovan, C.

  • Author_Institution
    Nat. Inst. for R&D in Microtechnol., Bucharest
  • Volume
    1
  • fYear
    2007
  • fDate
    Oct. 15 2007-Sept. 17 2007
  • Firstpage
    143
  • Lastpage
    146
  • Abstract
    Microcantilevers with very small mass and dimensions can detect mass changes at individual molecules level. Therefore, the paper is dedicated to cantilever sensor design optimization. The simulations of the cantilever in the static mode have been performed in order to evaluate the sensitivity of the device at very low mass lauding (ng) cantilever based. The biosensor proves specificity, works in real time and in different environment conditions. The simulations have the role to optimize the dimensions of the cantilevers and to minimize the number of the experiments.
  • Keywords
    biosensors; cantilevers; biosensing application; cantilever sensor design optimization; microcantilever design; Biological system modeling; Biosensors; Chemical and biological sensors; Force measurement; Optical beams; Optical collimators; Optical reflection; Sensor arrays; Stress; Structural beams; design and simulations; microcantilevers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 2007. CAS 2007. International
  • Conference_Location
    Sinaia
  • ISSN
    1545-827X
  • Print_ISBN
    978-1-4244-0847-4
  • Type

    conf

  • DOI
    10.1109/SMICND.2007.4519667
  • Filename
    4519667