DocumentCode
474305
Title
Simulation and Design of a Microcantilever for Biosensing Application
Author
Ion, M. ; Pachiu, C. ; Moldovan, C.
Author_Institution
Nat. Inst. for R&D in Microtechnol., Bucharest
Volume
1
fYear
2007
fDate
Oct. 15 2007-Sept. 17 2007
Firstpage
143
Lastpage
146
Abstract
Microcantilevers with very small mass and dimensions can detect mass changes at individual molecules level. Therefore, the paper is dedicated to cantilever sensor design optimization. The simulations of the cantilever in the static mode have been performed in order to evaluate the sensitivity of the device at very low mass lauding (ng) cantilever based. The biosensor proves specificity, works in real time and in different environment conditions. The simulations have the role to optimize the dimensions of the cantilevers and to minimize the number of the experiments.
Keywords
biosensors; cantilevers; biosensing application; cantilever sensor design optimization; microcantilever design; Biological system modeling; Biosensors; Chemical and biological sensors; Force measurement; Optical beams; Optical collimators; Optical reflection; Sensor arrays; Stress; Structural beams; design and simulations; microcantilevers;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 2007. CAS 2007. International
Conference_Location
Sinaia
ISSN
1545-827X
Print_ISBN
978-1-4244-0847-4
Type
conf
DOI
10.1109/SMICND.2007.4519667
Filename
4519667
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