Title :
Simulation and Design of a Microcantilever for Biosensing Application
Author :
Ion, M. ; Pachiu, C. ; Moldovan, C.
Author_Institution :
Nat. Inst. for R&D in Microtechnol., Bucharest
fDate :
Oct. 15 2007-Sept. 17 2007
Abstract :
Microcantilevers with very small mass and dimensions can detect mass changes at individual molecules level. Therefore, the paper is dedicated to cantilever sensor design optimization. The simulations of the cantilever in the static mode have been performed in order to evaluate the sensitivity of the device at very low mass lauding (ng) cantilever based. The biosensor proves specificity, works in real time and in different environment conditions. The simulations have the role to optimize the dimensions of the cantilevers and to minimize the number of the experiments.
Keywords :
biosensors; cantilevers; biosensing application; cantilever sensor design optimization; microcantilever design; Biological system modeling; Biosensors; Chemical and biological sensors; Force measurement; Optical beams; Optical collimators; Optical reflection; Sensor arrays; Stress; Structural beams; design and simulations; microcantilevers;
Conference_Titel :
Semiconductor Conference, 2007. CAS 2007. International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-0847-4
DOI :
10.1109/SMICND.2007.4519667