Title :
Replication Techniques for Micro-Optics
Author :
Obreja, Paula ; Cristea, Dana ; Dinescu, Adrian ; Manea, Elena
Author_Institution :
Nat. Inst. for R&D in Microtechnologies, Bucharest
fDate :
Oct. 15 2007-Sept. 17 2007
Abstract :
In this paper we have investigated the molding and release parameters required for three- dimensional micro/nanofabrication in order to optimize the process and to apply it in the fabrication of micro/nano photonic structures. The replicas for various patterns (dots, lines, prism and lens) were obtained in polymethylmethacrylate (PMMA), epoxy resin and polydimethylsiloxane (PDMS) in different conditions for polymer coating and curing.
Keywords :
micro-optics; moulding; polymer films; curing; epoxy resin; micro optics; molding; polydimethylsiloxane; polymer coating; polymethylmethacrylate; release parameters; replication techniques; Biomedical optical imaging; Curing; Epoxy resins; Optical materials; Optical mixing; Optical polymers; Optical pumping; Polymer films; Silicon; Soft lithography; micro-optics; replica molding;
Conference_Titel :
Semiconductor Conference, 2007. CAS 2007. International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-0847-4
DOI :
10.1109/SMICND.2007.4519677
