Design and Proposed Technological Flow of an Y-Splitter Waveguide Grating Sensor

The paper presents the design and fabrication of an Y-splitter waveguide grating sensor for measuring the refractive index variation of the surrounding medium. The sensor consists of a SU8 waveguide Y-splitter on silicon dioxide buffer layer grown on a silicon substrate. The amount of radiation coupled from the waveguide into the silicon substrate due to the grating depends on the different values of the surrounding medium refractive index.