Title :
Low Design of Micromachined Coplanar Grounded Wave-Guides
Author :
De Angelis, G. ; Lucibello, A. ; Proietti, E. ; Catoni, S. ; Marcelli, R.
Author_Institution :
CNR-IMM Roma, Rome
fDate :
Oct. 15 2007-Sept. 17 2007
Abstract :
Coplanar wave-guide grounded lines (CPWG) have been designed for being realized by micromachining of high resistivity silicon wafers. Actually, different configurations have been compared between them by changing the dimensions of micromachined via-holes, as well as their number and separation, to get the optimal electrical matching conditions for CPWG lines. Wide-band matching and low losses have been predicted up to 30 GHz, and preliminary experimental results about the technology have been obtained.
Keywords :
coplanar waveguides; coplanar wave-guide grounded lines; frequency 30 GHz; micromachined coplanar grounded wave-guides; micromachined via-holes; optimal electrical matching; silicon wafers; wide-band matching; Conductivity; Coplanar waveguides; Etching; Joining processes; Micromachining; Microstrip; Packaging; Silicon; Thermal resistance; Wideband; RF MEMS; micromachining;
Conference_Titel :
Semiconductor Conference, 2007. CAS 2007. International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4244-0847-4
DOI :
10.1109/SMICND.2007.4519699
