Surface-normal fano filters based on transferred silicon nanomembranes on glass substrates

Author

Yang, Hongjun ; Qiang, Zexuan ; Pang, Huiqing ; Ma, Zhenqiang ; Zhou, Weidong ; Lu, Mingyu ; Soref, Richard A.

Author_Institution

Dept. of Electr. Eng., Univ. of Texas at Arlington, Arlington, TX

fYear

2008

fDate

4-9 May 2008

Firstpage

1

Lastpage

2

Abstract

We report here the design and experimental results on surface-normal optical filters based on Fano resonance in patterned single crystalline silicon nanomembranes (SiNM), which were fabricated and transferred onto transparent glass substrates using a disruptive SiNM wet transfer process. The measured filter transmission results agree well with the design. Further design and process optimizations can lead to high Q filters, suitable for ultra-compact surface normal filters, switches and modulators.

Keywords

elemental semiconductors; membranes; nanostructured materials; nanotechnology; optical filters; silicon; Fano resonance; Si; SiO₂; high Q filters; optical filters; single crystalline silicon nanomembranes; surface-normal Fano filters; Filters; Glass; Silicon; (060.1810) Couplers, switches, and multiplexers; (250.5300) Photonic integrated circuits; (999.9999) Photonic crystals;

fLanguage

English

Publisher

iet

Conference_Titel

Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on

Conference_Location

San Jose, CA

Print_ISBN

978-1-55752-859-9

Type

conf

Filename

4572341