Title :
High-index-contrast AlGaAs waveguide scattering loss reduction via oxidation smoothing of sidewall roughness
Author :
Seibert, Christopher S. ; Liang, Di ; Hall, Douglas C. ; Shellenbarger, Zane A.
Author_Institution :
Dept. of Electr. Eng., Notre Dame Univ., Notre Dame, IN
Abstract :
The propagation loss of single mode high index contrast AlGaAs ridge waveguides is reduced nearly three orders of magnitude (at 1 cm guide length) through application of a nonselective wet oxidation sidewall roughness smoothing technique.
Keywords :
III-V semiconductors; aluminium compounds; optical fabrication; optical losses; optical waveguides; oxidation; ridge waveguides; surface roughness; AlGaAs; high-index-contrast AlGaAs waveguide; nonselective wet oxidation; propagation loss; ridge waveguide; scattering loss reduction; sidewall roughness; smoothing technique; Etching; III-V semiconductor materials; Light scattering; Optical scattering; Optical waveguides; Oxidation; Particle scattering; Propagation losses; Smoothing methods; Waveguide lasers; (130.2790) Guided Waves; (290.5880) Scattering, Rough Surfaces;
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9
