DocumentCode
475003
Title
Modular control system for a magnetic levitated stage
Author
Caraiani, Mitica ; Jeon, Jeong-Woo ; Oh, Hyeon-Seok
Author_Institution
Korea Electrotechnol. Res. Inst., Changwon
Volume
2
fYear
2008
fDate
22-25 May 2008
Firstpage
75
Lastpage
80
Abstract
We developed a magnetic levitated stage system, which allows precise positioning in six DoFs, with only one mover. It requires control of force in many points. Besides, the number of controlled points can vary with the travel range. For these reasons, a modular concept for the control and driving system is required. The paper presents the way in which the modularity is obtained in terms of control algorithm, embedded computing and driving.
Keywords
force control; magnetic levitation; nonlinear control systems; position control; precision engineering; control algorithm; magnetic levitated stage system; modular control system; offeree control; precise positioning; Capacitive sensors; Coils; Control systems; Embedded computing; Fabrication; Force control; Magnetic fields; Magnetic levitation; Magnetic sensors; Motion control;
fLanguage
English
Publisher
ieee
Conference_Titel
Automation, Quality and Testing, Robotics, 2008. AQTR 2008. IEEE International Conference on
Conference_Location
Cluj-Napoca
Print_ISBN
978-1-4244-2576-1
Electronic_ISBN
978-1-4244-2577-8
Type
conf
DOI
10.1109/AQTR.2008.4588797
Filename
4588797
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