3D control system of the electron beam spot

Electron beams have many special properties which make them particularly well suited for use in materials processing, wherever conventional techniques failed or proved to be inefficient. The entire process has many time varying parameters, but some of the most important for the quality of the material processing are given by the directing parts. The paper presents a 3D control system of the electron beam spot which contains the focusing and deflecting components. Due the nature of the process we used a PI control for the deflecting system and an adaptive fuzzy control for the focusing system.