Silicon technology for photonic crystal- and nanowire devices

Author

Wosinski, Lech ; Jaskorzynska, Bozena

Author_Institution

Dept. of Microelectron. & Appl. Phys., R. Inst. of Technol., Kista

Volume

2

fYear

2008

fDate

22-26 June 2008

Firstpage

21

Lastpage

24

Abstract

In this talk we will discuss issues related to technology for dense photonic integration based on silicon platform, and review two alternatives to achieve this goal within the diffraction limit; photonic nanowires and photonic crystal waveguides. We will also present examples of our demonstrators to illustrate the feasibility of photonic wires for device miniaturization and benefits offered by photonic crystal dispersion.

Keywords

nanowires; optical dispersion; optical waveguides; photonic crystals; silicon; Si; dense photonic integration; diffraction limit; photonic crystal devices; photonic crystal dispersion; photonic crystal waveguides; photonic nanowire devices; photonic nanowires; silicon technology; Etching; Nanoscale devices; Optical films; Optical materials; Optical refraction; Optical scattering; Optical waveguides; Photonic crystals; Plasma temperature; Silicon; nanophotonics; photonic crystals; photonic integrated circuits; planar lightwave circuits; silicon integration; silicon on insulator; silicon wire waveguides;

fLanguage

English

Publisher

ieee

Conference_Titel

Transparent Optical Networks, 2008. ICTON 2008. 10th Anniversary International Conference on

Conference_Location

Athens

Print_ISBN

978-1-4244-2625-6

Electronic_ISBN

978-1-4244-2626-3

Type

conf

DOI

10.1109/ICTON.2008.4598578

Filename

4598578