Title :
Simulation of thermally stable chamber designed for testing LTCC structures
Author :
Bienkowski, A. ; Bembnowicz, P. ; Roguszczak, H. ; Golonka, L.J.
Author_Institution :
Wroc¿aw University of Technology, POLAND
Abstract :
A chamber providing thermally stable environment for LTCC (Low Temperature Co-fired Ceramics) structures testing is designed and fabricated. Such device can be applied in a wide range of preliminary testing stages of the LTCC based Microsystems, especially microfluidic one. The aim is to obtain good temperature uniformity and stability. A steady state thermal simulation is done and evaluated with infrared thermography.
Keywords :
Ceramics; Cooling; Fabrication; Heat transfer; Heating; Microfluidics; Sensor arrays; Temperature dependence; Temperature sensors; Testing; Chamber; FEM; LTCC; Thermal distribution;
Conference_Titel :
Mixed Design of Integrated Circuits and Systems, 2008. MIXDES 2008. 15th International Conference on
Conference_Location :
Poznan, Poland
Print_ISBN :
978-83-922632-7-2
Electronic_ISBN :
978-83-922632-8-9
