Title :
Tool support for microelectronic process development
Author :
Ortloff, D. ; Popp, J. ; Hahn, K. ; Schmidt, T. ; Bruck, R.
Author_Institution :
Process Relations GmbH, Dortmund, GERMANY
Abstract :
This paper investigates the practices for developing manufacturing processes in the high tech industries and specifically in the field of semiconductor thin film process technologies. For this purpose the current development practices are described, issues arising from the current practices are extracted and ways to approach these issues are highlighted. Outlines of solutions to several of these problems are provided by a software tool suite called XperiDesk.
Keywords :
Data engineering; Electronic design automation and methodology; Fabrication; Manufacturing industries; Manufacturing processes; Microelectronics; Micromechanical devices; Process design; Semiconductor device manufacture; Software tools; Fabrication process development; Process design; TCAD;
Conference_Titel :
Mixed Design of Integrated Circuits and Systems, 2008. MIXDES 2008. 15th International Conference on
Conference_Location :
Poznan, Poland
Print_ISBN :
978-83-922632-7-2
Electronic_ISBN :
978-83-922632-8-9
