DocumentCode
475472
Title
Tool support for microelectronic process development
Author
Ortloff, D. ; Popp, J. ; Hahn, K. ; Schmidt, T. ; Bruck, R.
Author_Institution
Process Relations GmbH, Dortmund, GERMANY
fYear
2008
fDate
19-21 June 2008
Firstpage
467
Lastpage
472
Abstract
This paper investigates the practices for developing manufacturing processes in the high tech industries and specifically in the field of semiconductor thin film process technologies. For this purpose the current development practices are described, issues arising from the current practices are extracted and ways to approach these issues are highlighted. Outlines of solutions to several of these problems are provided by a software tool suite called XperiDesk.
Keywords
Data engineering; Electronic design automation and methodology; Fabrication; Manufacturing industries; Manufacturing processes; Microelectronics; Micromechanical devices; Process design; Semiconductor device manufacture; Software tools; Fabrication process development; Process design; TCAD;
fLanguage
English
Publisher
iet
Conference_Titel
Mixed Design of Integrated Circuits and Systems, 2008. MIXDES 2008. 15th International Conference on
Conference_Location
Poznan, Poland
Print_ISBN
978-83-922632-7-2
Electronic_ISBN
978-83-922632-8-9
Type
conf
Filename
4600962
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