Determination of Coupled-of-Modes Parameters by Applying Neural Network Technique

The coupling-of-modes (COM) theory has been widely used in simulation of surface acoustic wave devices. The accuracy of simulation strongly depends on accurate COM parameters of the piezoelectric substrate. The COM parameters of most single crystal piezoelectric substrates can be obtained in literatures. However, for thin film and multilayer substrate, the COM parameters are often not accessible. In this paper, a method that uses neural network technique to extract COM parameters was proposed. The validity of the method was verified by simulation of a two-port SAW filter with uniform interdigital transducer structure.