Title :
Rigorous analysis of light scattering from multilayered gratings with biaxial anisotropy
Author :
Michalski, Krzysztof Arkadiusz
Author_Institution :
Dept. of Electr. & Comput. Eng., Texas A&M Univ., College Station, TX
Abstract :
The rigorous coupled-wave approach (RCWA) is applied to analyze light scattering from one-dimensional lamellar multilayered gratings with biaxial anisotropy. Numerical results are presented for photoresist traces on a silicon substrate, showing the effect of anisotropy on the Stokes parameters.
Keywords :
diffraction gratings; light scattering; photoresists; 1D lamellar multilayered gratings; Stokes parameters; biaxial anisotropy; light scattering; photoresist traces; rigorous analysis; rigorous coupled-wave approach; Anisotropic magnetoresistance; Diffraction gratings; Light scattering; Magnetic fields; Maxwell equations; Optical coupling; Permeability; Permittivity; Polarization; Stokes parameters;
Conference_Titel :
Microwaves, Radar and Wireless Communications, 2008. MIKON 2008. 17th International Conference on
Conference_Location :
Wroclaw
Print_ISBN :
978-83-906662-8-0
