DocumentCode
477268
Title
Processing of films and fabrics with the MOD VIII roll-to-roll one atmosphere uniform glow discharge plasma (OAUGDP®) reactor
Author
Li, Quingquan ; Tsai, Peter P. ; Nourgostar, Sirous ; Chen, Zhe ; Roth, J. Reece
Author_Institution
School of Electrical Engineering, Shandong University, Jinan, China 250061
Volume
1
fYear
2007
fDate
17-22 June 2007
Firstpage
372
Lastpage
375
Abstract
Atmospheric pressure plasma treatment has unique advantages over vacuum treatment for such industrial applications as surface energy ehancement of materials, cleaning, decontamination, and sterilization of surfaces, surface etching, plasma chemical vapor deposition (PCVD), and related tasks. The MOD VIII plasma reactor system has been developed to provide roll-to-roll surface treatment of fabrics and films using a One Atmosphere Uniform Glow Discharge Plasma (OAUGDP®) operating in air. Webs can be continuously and uniformly treated by proper control of gas flow; electrode configuration; plasma voltage, current, and frequency; fabric speed; and fabric tension.
Keywords
Atmosphere; Atmospheric-pressure plasmas; Fabrics; Glow discharges; Inductors; Plasma applications; Plasma chemistry; Plasma materials processing; Surface discharges; Surface treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Pulsed Power Conference, 2007 16th IEEE International
Conference_Location
Albuquerque, NM
Print_ISBN
978-1-4244-0913-6
Electronic_ISBN
978-1-4244-0914-3
Type
conf
DOI
10.1109/PPPS.2007.4651861
Filename
4651861
Link To Document