DocumentCode :
47877
Title :
Sidewall Nanotexturing for High Rupture Strength of Silicon Solar Cells
Author :
Kashyap, Kunal ; Kumar, Amarendra ; Hou, Max T. ; Yeh, J. Andrew
Author_Institution :
Inst. of Nanoengineering & Microsyst., Nat. Tsing Hua Univ., Hsinchu, Taiwan
Volume :
24
Issue :
1
fYear :
2015
fDate :
Feb. 2015
Firstpage :
7
Lastpage :
9
Abstract :
Photovoltaic, microelectromechanical systems, and integrated circuit industries are demanding a technology to enable the high rupture resistant silicon wafer production to improve the manufacturing yield. The presented silicon nanotexture patterning on the edges and sidewalls by wet chemical etching process can protect single-crystalline and multicrystalline silicon samples from rupture. Bending tests indicate a mechanical strength enhancement of ~ 72%-75% for sc-silicon and ~71%-73% for mc-silicon samples. In addition, the front and back surfaces of the samples remain intact and appropriate for any further semiconductor processes. This technology was implemented in solar cells that exhibited a strength improvement of nearly 73% without affecting their photovoltaic performances, anticipating an effective solution for the solar cell manufacturing industry.
Keywords :
bending; elemental semiconductors; etching; fracture; integrated circuit manufacture; mechanical strength; nanopatterning; silicon; solar cells; surface texture; Si; back surfaces; bending tests; front surfaces; high rupture resistant silicon wafer production; high rupture strength; integrated circuit industries; manufacturing yield; mechanical strength enhancement; microelectromechanical systems; multicrystalline silicon sample protection; photovoltaic performances; semiconductor processes; sidewall nanotexturing; silicon nanotexture patterning; silicon solar cells; single-crystalline silicon sample protection; solar cell manufacturing industry; wet chemical etching process; Industries; Photovoltaic cells; Photovoltaic systems; Silicon; Stress; Surface treatment; Nanotechnology; carrier lifetime; mechanical strength; silicon nanotextures; solar cell efficiency; solar cell efficiency.; solar cells;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2014.2365589
Filename :
6962900
Link To Document :
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