Correlation of On-Die capacitance for power delivery network

On-die capacitance is critical parameter in power delivery analysis and design, which impacts design cost and system performance. To improve modeling accuracy, correlation was studied for on-die capacitance among internal algorithm/tool, on-die PDA, Apachepsilas RedHawk and lab measurement. Internal tool, on-die PDA is a tool to automatically simulate on-die models including Cdie, Rdie and Icc(t). RedHawk is a commercial tool by Apache Design Solution Inc. to simulate silicon power/ground noise, and generate on-die models with chip power model (CPM) feature. Measurement was conducted in frequency domain by VNA. In general, three approaches agree with each other reasonably, however, discrepancies come from the limitations of the methods. In this paper, the procedures of these 3 approaches are described. The pros and cons are analyzed, and recommendations are proposed.