A CMOS-MEMS scanning probe microscope with integrated position sensors

We report on an integrated scanning probe microscope (SPM) fabricated in a CMOS-MEMS process. The design of this device is driven by the requirements of an atomically precise manufacturing (APM) approach based on patterned atomic layer epitaxy (ALE). A scan range of 10 mum times 10 mum is achieved with in-plane electrothermal actuation, and the cantileverpsilas out-of-plane range of motion enables a 30 mum sample approach. A test structure to optimize the in-plane actuator design is preseented, and its results are compared to an FEA model. Piezoresistive strain gauges and temperature sensors are strategically located in the in-plane actuators and the out-of-plane cantilever for use in an off-chip closed-loop positioning system.