The electrical characteristic simulation of cantilever beam used in micro battery

The electrical characteristic simulation of piezoelectric cantilever beam using the Finite-element Analysis (FEA) software ANSYS 8.1 is reported. The cantilever beam is actuated by sol-gel-derived lead zirconium titanate (PZT). Small multi-layered beams with a seismic mass at the free end are used to analyses the direct piezoelectric effect. Through modal analysis the four mode shapes and natural frequencies are obtained. The cantilever beam vibrates from up to down at the first natural frequency, which is what we need. Harmonic analysis predicts that the potential differences between the up and down electrodes increase with the increase of the environment acceleration, the length of the cantilever beam, the thickness of the PZT, the thickness and length of the seismic mass, but decrease with increase of the thickness of the cantilever beam. As for the width of the beam, the maximum voltage happens the width is 500μm, which is half the length of the beam.