The structure analysis on the ladder cantilever micromachined tunnelling gyroscope

The sensitivity and discrimination of the gyroscope can be improved largely by the detection meaning of electronic tunnel effect. But the proof mass of the gyroscope will cause transversal and longitudinal oscillate, for the driving force and Coriolis force. the electronic tunnel effect desires that the poles of the tunnel can only move longitudinally, otherwise the coarse of the pole’s surface will influence the current of the tunnel. Above all, the structure of the system should overcome the coupling of the driving mode and detection mode. The ladder cantilever can reduce the coupling between the driving mode and detecting mode. According to the prerequisite and characteristic of tunneling effect, a scheme of gyroscope structure are presented.