Electrically tunable bulk acoustic filters with induced piezoelectric effect in BSTO film

Author

Turalchuk, Pavel ; Vendik, Irina ; Vendik, Orest ; Berge, John

Author_Institution

Dept. of Microelectron. & Radio Eng., St. Petersburg Electrotech. Univ., St. Petersburg

fYear

2008

fDate

27-28 Oct. 2008

Firstpage

274

Lastpage

277

Abstract

In this paper we discuss a potential realizability of a tunable bulk acoustic filter based on BSTO film for microwave applications. The estimation of characteristics of the tunable TFBAR was done by processing the experimental data obtained for the BSTO resonator using the model of the induced piezoelectric effect. The third-order tunable TFBAR filter was designed. The necessary set of the acoustic and electric parameters of the tunable ferroelectric based TFBAR was proclaimed. The 10% tunability of the TFBAR filter pass band was estimated by a simulation. The simulated characteristics were obtained taking into consideration a real structure of the BSTO based resonators (electrodes and acoustic mirror).

Keywords

acoustic resonator filters; barium compounds; ferroelectric thin films; microwave filters; piezoelectricity; strontium compounds; BSTO film; BSTO resonator; BaSrTiO₃; TFBAR filter; bulk acoustic filters; electric tuning; piezoelectric effect; Acoustic applications; Band pass filters; Electrodes; Ferroelectric materials; Film bulk acoustic resonators; Microwave filters; Mirrors; Piezoelectric effect; Piezoelectric films; Resonator filters;

fLanguage

English

Publisher

ieee

Conference_Titel

Wireless Technology, 2008. EuWiT 2008. European Conference on

Conference_Location

Amsterdam

Print_ISBN

978-2-87487-008-8

Type

conf

Filename

4753860