Phase Processing of No-Drive Structure Silicon Micromachined Gyroscope

The phase picking up technique of silicon micromachined gyroscope used for rotating carrier is introduced. When the sensitivity axis is parallel to the deflexion plane, silicon pendulum will get the biggest Coriolis force, and the outputs are the peak value of the sine wave. However, when the sensitivity axis is perpendicularity to the deflexion plane, the outputs are the zero value of the sine wave. The self-rotated signal of the carrier (accelerometer) as benchmark, comparing to the output signal phase of the carrier and the gyroscope, then subtracting the lagged value from the phase difference of the accelerometer and the gyroscope, we can confirm the real deflecting direction of the carrier in the space.