Title :
HBM ESD failures caused by a parasitic pre-discharge current spike
Author :
Etherton, Melanie ; Axelrod, Victor ; Meuse, Tom ; Miller, James W. ; Marom, Haim
Author_Institution :
Freescale Semicond. Inc., Austin, TX, USA
Abstract :
A new tester-induced HBM current waveform anomaly was discovered as a result of efforts to understand the cause of low level HBM failures seen on 65 nm CMOS products. The anomaly, which consists of a current spike occurring just prior to the actual HBM pulse, was found to be caused by contact misalignment in the tester¿s discharge relay.
Keywords :
integrated circuit testing; CMOS products; HBM ESD failures; contact misalignment; discharge relay; parasitic pre-discharge current spike; tester-induced HBM current waveform anomaly; Biological system modeling; Circuit testing; Clamps; Electrostatic discharge; MOSFET circuits; Protection; Qualifications; Rails; Stress; Trigger circuits;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium, 2008. EOS/ESD 2008. 30th
Conference_Location :
Tucson, AZ
Print_ISBN :
978-1-58537-146-4
Electronic_ISBN :
978-1-58537-147-1
