DocumentCode
483378
Title
Analysis of charged device model (CDM) ESD in MEMS
Author
Greason, William D.
Author_Institution
Appl. Electrostatics Res. Centre, Univ. of Western Ontario, London, ON
fYear
2008
fDate
7-11 Sept. 2008
Firstpage
281
Lastpage
289
Abstract
The effect of charge injection due to CDM ESD in capacitive MEMS structures is analyzed. The results show that as feature size is reduced, ESD injected charge produces a change for the stiction effect which is inversely proportional to the square of the plate area and a change in the dielectric layer breakdown which is inversely proportional to the plate area. Charge and voltage modes in MEMS are also examined.
Keywords
electric breakdown; electrostatic discharge; micromechanical devices; ESD; capacitive MEMS structures; charge injection effect; charged device model analysis; dielectric layer breakdown; plate area; voltage modes; Biological system modeling; Capacitance; Capacitors; Circuits; Conductors; Electrostatic analysis; Electrostatic discharge; Micromechanical devices; Packaging; Pins;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Overstress/Electrostatic Discharge Symposium, 2008. EOS/ESD 2008. 30th
Conference_Location
Tucson, AZ
Print_ISBN
978-1-58537-146-4
Electronic_ISBN
978-1-58537-147-1
Type
conf
Filename
4772145
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