• DocumentCode
    483395
  • Title

    C4. ESD control and design for extremely sensitive (“Class 0”) devices

  • Author

    Heymann, Steve

  • Author_Institution
    MKS Ion Systems, USA
  • fYear
    2008
  • fDate
    7-11 Sept. 2008
  • Firstpage
    348
  • Lastpage
    348
  • Abstract
    Class 0 devices require proactive tool designs for ESD control. What are the design and control techniques required for high-yield handling and manufacturing of ALL types of highly ESD sensitive devices? How can you make sure your Class 0 device is safe? What safety margin can you afford to design into your process and tools? We will discuss considerations regarding product protection including, but not limited to semiconductor, HDD, medical devices and others. Manufacturers constantly have to deal with a balance between cost and the ability to handle these devices in a safe and cost effective manner. We will focus on techniques to protect against damage to extremely sensitive devices. Topics and issues concerning tool configuration, design practices, material selections, and test methods will be discussed in detail.
  • Keywords
    Control systems; Costs; Earth Observing System; Electrostatic discharge; Materials testing; Process design; Protection; Safety; Semiconductor device manufacture;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrical Overstress/Electrostatic Discharge Symposium, 2008. EOS/ESD 2008. 30th
  • Conference_Location
    Tucson, AZ, USA
  • Print_ISBN
    978-1-58537-146-4
  • Electronic_ISBN
    978-1-58537-147-1
  • Type

    conf

  • Filename
    4772162