DocumentCode :
483395
Title :
C4. ESD control and design for extremely sensitive (“Class 0”) devices
Author :
Heymann, Steve
Author_Institution :
MKS Ion Systems, USA
fYear :
2008
fDate :
7-11 Sept. 2008
Firstpage :
348
Lastpage :
348
Abstract :
Class 0 devices require proactive tool designs for ESD control. What are the design and control techniques required for high-yield handling and manufacturing of ALL types of highly ESD sensitive devices? How can you make sure your Class 0 device is safe? What safety margin can you afford to design into your process and tools? We will discuss considerations regarding product protection including, but not limited to semiconductor, HDD, medical devices and others. Manufacturers constantly have to deal with a balance between cost and the ability to handle these devices in a safe and cost effective manner. We will focus on techniques to protect against damage to extremely sensitive devices. Topics and issues concerning tool configuration, design practices, material selections, and test methods will be discussed in detail.
Keywords :
Control systems; Costs; Earth Observing System; Electrostatic discharge; Materials testing; Process design; Protection; Safety; Semiconductor device manufacture;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium, 2008. EOS/ESD 2008. 30th
Conference_Location :
Tucson, AZ, USA
Print_ISBN :
978-1-58537-146-4
Electronic_ISBN :
978-1-58537-147-1
Type :
conf
Filename :
4772162
Link To Document :
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