DocumentCode
486116
Title
The Application of Control Theory to the Automation of I.C. Manufacturing: Progress and Problems
Author
Atherton, Robert W.
Author_Institution
INCYTE, Fairchild/ A Schlumberger Company, Four Main Street, Los Altos, California 94022
fYear
1984
fDate
6-8 June 1984
Firstpage
752
Lastpage
756
Abstract
This paper provides an overview of process control in integrated circuit manufacturing. Manufacturing process control has been implemented as part of a computer-integrated manufacturing system. The disciplines of systems engineering, software engineering, and operations research have made major impacts on the automation effort. Control problems involved in the automation of semiconductor manufacturing will be described. The relevance of control theory to these problems will be evaluated, in particular the role of stochastic control.
Keywords
Application software; Automatic control; Computer integrated manufacturing; Control systems; Control theory; Integrated circuit manufacture; Manufacturing automation; Manufacturing processes; Process control; Systems engineering and theory;
fLanguage
English
Publisher
ieee
Conference_Titel
American Control Conference, 1984
Conference_Location
San Diego, CA, USA
Type
conf
Filename
4788476
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