DocumentCode
486953
Title
Statistical Control of VLSI Fabrication Processes
Author
Mozumder, P.K. ; Shyamsundar, C.R. ; Strojwas, A.J.
Author_Institution
SRC-CMU Center for Computer-Aided Design, Carnegie Mellon University, Pittsburgh, Pennsylvania 15213
fYear
1987
fDate
10-12 June 1987
Firstpage
717
Lastpage
722
Abstract
This paper presents a methodology for statistical control of VLSI fabrication processes. After a brief description of the stochastic nature of VLSI manufacturing, theoretical foundations of the on-line control system and algorithms for implementing it are presented.
Keywords
Circuits; Fabrication; Fluctuations; Performance evaluation; Process control; Production; Semiconductor device measurement; Silicon; Testing; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
American Control Conference, 1987
Conference_Location
Minneapolis, MN, USA
Type
conf
Filename
4789409
Link To Document