Optimizing Scanning Mirror System Performance using Solid State Piezoelectric Actuators

Solid state actuators have several advantages over coil-driven motors. They are easily shaped, less expensive, lighter, and faster. They provide motion without separate pulleys, gears and shafts. Since there are no surfaces to wear out, solid state actuators are rugged and dependable, providing benefits in cost and reliability of performance. In this paper the design of a scanning mirror system using piezoelectric actuators is presented. A dual-cantilevered bimorph electromechanical coupling is used in order to maximize the amount of angular deflection possible with an applied field. Rate feedback provides resonance damping. Position feedback provides increased bandwidth and decreased hysteresis. A prototype system, including the actuator and feedback mechanism, is developed. Its performance compares favorably with its model; it is capable of plus or minus five degrees of angular deflection with a bandwidth of three hundred Hertz.