DocumentCode
489509
Title
A Simple Adaptive Controller for an Oxidation Process
Author
Tsakalis, Kostas S. ; Crouch, Peter E.
Author_Institution
Department of Electrical Engineering, Center for Systems Science and Engineering, Arizona State University, Tempe, AZ 85287
fYear
1992
fDate
24-26 June 1992
Firstpage
1023
Lastpage
1027
Abstract
In this note we discuss the application of adaptive controller design techniques in a manufacturing process. As an example, we consider the process of oxidation of silicon in dry oxygen. This process consists of a single batch step where silicon wafers are introduced in a chamber and are oxidized for a time period at high temperature. Our objective is to determine the oxidation time such that a prescribed oxide thickness is grown on the silicon.
Keywords
Adaptive control; Control systems; Design engineering; Manufacturing processes; Oxidation; Programmable control; Silicon; Systems engineering and theory; Temperature; Uncertain systems;
fLanguage
English
Publisher
ieee
Conference_Titel
American Control Conference, 1992
Conference_Location
Chicago, IL, USA
Print_ISBN
0-7803-0210-9
Type
conf
Filename
4792240
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