Title :
Guest Editorial: Special Issue on Ion Sources and Their Applications
Author :
Yukimura, Ken ; Takaki, K.
Author_Institution :
National Institute of Advanced Industrial Science and Technology (AIST), Nanoelectronics Research Institute, Tsukuba, Japan
Abstract :
The nine papers in this special issue cover the topics of ion and plasma generations, diagnostics, and various applications of their ion sources.
Keywords :
Ion beam applications; Ion beams; Ion implantation; Ion sources; Plasmas; Special issues and sections;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2013.2272668
