• DocumentCode
    49015
  • Title

    Guest Editorial: Special Issue on Ion Sources and Their Applications

  • Author

    Yukimura, Ken ; Takaki, K.

  • Author_Institution
    National Institute of Advanced Industrial Science and Technology (AIST), Nanoelectronics Research Institute, Tsukuba, Japan
  • Volume
    41
  • Issue
    8
  • fYear
    2013
  • fDate
    Aug. 2013
  • Firstpage
    1817
  • Lastpage
    1818
  • Abstract
    The nine papers in this special issue cover the topics of ion and plasma generations, diagnostics, and various applications of their ion sources.
  • Keywords
    Ion beam applications; Ion beams; Ion implantation; Ion sources; Plasmas; Special issues and sections;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2013.2272668
  • Filename
    6563146
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=49015