Title :
A Model Predictive Controller for Multivariable Temperature Control in Rapid Thermal Processing
Author :
Breedijk, Terence ; Edgar, Thomas F. ; Trachtenberg, Isaac
Author_Institution :
Department of Chemical Engineering, The University of Texas at Austin, Austin, Texas 78712; Texas Instruments, Inc., P.O. Box 655012, MS 944, Dallas, TX 75265
Abstract :
An improved dynamic model for a multi-zone circularly symmetric rapid thermal processing (RTP) system has been developed and validated. The model incorporates radiative, conductive and convective heat transfer mechanisms and allows for chamber heat-up as observed in real RTP systems. A multivariable nonlinear model predictive controller (NMPC) has been developed for this system. We investigate how the choice of the objective function in the NMPC formulation of a distributed parameter system impacts controller performance.
Keywords :
CMOS technology; Control systems; Nonlinear control systems; Open loop systems; Predictive models; Rapid thermal processing; Semiconductor device modeling; Semiconductor process modeling; Temperature control; Thermal variables control;
Conference_Titel :
American Control Conference, 1993
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-0860-3
