DocumentCode
490760
Title
Preparation and Characteristic of Li14 Zn(GeO4 )4 Thin Films for Solid State Batteries
Author
Ohtsuka, Hideaki ; Yamaji, Akihiko
Author_Institution
Ibaraki Electrical Communication Laboratory, NTT., Tokai, Ibaraki-ken, 319-11, Japan
fYear
1983
fDate
18-21 Oct. 1983
Firstpage
353
Lastpage
359
Abstract
Lithium conductive solid electrolyte films are expected for all solid state lithium batteries. Li14 Zn(GeO4 )4 (LISICON) phase thin films have been prepared by r.f. sputtering and vacuum evaporation method with electron beam heating. The sputtered film surface is considerably rougher than the evaporated film surface. The conductivities of both LISICON films at 500 °C are 5 à 10-3 ¿-1 cm-1. The conductivity of the sputtered film is higher than that of the evaporated film below 500 °C.
Keywords
Batteries; Conductive films; Conductivity; Electron beams; Heating; Lithium; Rough surfaces; Solid state circuits; Sputtering; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
Telecommunications Energy Conference, 1983. INTELEC '83. Fifth International
Conference_Location
Tokyo, Japan
Type
conf
Filename
4793843
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