• DocumentCode
    490760
  • Title

    Preparation and Characteristic of Li14Zn(GeO4)4 Thin Films for Solid State Batteries

  • Author

    Ohtsuka, Hideaki ; Yamaji, Akihiko

  • Author_Institution
    Ibaraki Electrical Communication Laboratory, NTT., Tokai, Ibaraki-ken, 319-11, Japan
  • fYear
    1983
  • fDate
    18-21 Oct. 1983
  • Firstpage
    353
  • Lastpage
    359
  • Abstract
    Lithium conductive solid electrolyte films are expected for all solid state lithium batteries. Li14Zn(GeO4)4 (LISICON) phase thin films have been prepared by r.f. sputtering and vacuum evaporation method with electron beam heating. The sputtered film surface is considerably rougher than the evaporated film surface. The conductivities of both LISICON films at 500 °C are 5 × 10-3 ¿-1 cm-1. The conductivity of the sputtered film is higher than that of the evaporated film below 500 °C.
  • Keywords
    Batteries; Conductive films; Conductivity; Electron beams; Heating; Lithium; Rough surfaces; Solid state circuits; Sputtering; Surface roughness;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Telecommunications Energy Conference, 1983. INTELEC '83. Fifth International
  • Conference_Location
    Tokyo, Japan
  • Type

    conf

  • Filename
    4793843