Title :
Automation design of typical MEMS accelerometer
Author :
Melnyk, Mykhaylo ; Kernytskyy, A. ; Denysyuk, Pavlo
Author_Institution :
CAD/CAM Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
Abstract :
The method of rapid analysis of the typical MEMS-accelerometers in the ANSYS environment is presented in the work.
Keywords :
accelerometers; electrical engineering computing; micromechanical devices; ANSYS environment; MEMS accelerometer; automation design; Acceleration; Accelerometers; Databases; Design automation; Geometry; Graphical user interfaces; Information analysis; Micromechanical devices; Production; Solid modeling; ANSYS; MEMS; accelerometer;
Conference_Titel :
CAD Systems in Microelectronics, 2009. CADSM 2009. 10th International Conference - The Experience of Designing and Application of
Conference_Location :
Lviv-Polyana
Print_ISBN :
978-966-2191-05-9
