Title :
High permittivity ferroelectric actuators for radar applications
Author :
Ficklen, J. ; Weaver, J. ; Chen, C. ; Ayon, A.A.
Author_Institution :
MEMS Res. Lab., Univ. of Texas at San Antonio, San Antonio, TX
Abstract :
We report a new method of fabricating thermal bimorph actuators utilizing high permittivity ferroelectric thin films. This device is the first known thermal cantilever actuator employing barium titanate (BaTiO3) for RF applications. Compared to electrostatic actuators, this MEMS structure is designed to handle high RF transmitted power while maintaining a high capacitance ratio due to the high permittivity of the ferroelectric thin film employed and without the stiction problems normally associated with other MEMS actuators.
Keywords :
barium compounds; cantilevers; ferroelectric thin films; microactuators; microfabrication; micromechanical devices; permittivity; radar applications; BaTiO3; MEMS structure; RF applications; RF transmitted power; barium titanate; capacitance ratio; ferroelectric thin films; high-permittivity ferroelectric actuators; radar applications; thermal bimorph actuators; thermal cantilever actuator; Barium; Capacitance; Electrostatic actuators; Ferroelectric materials; Micromechanical devices; Permittivity; Radar applications; Radio frequency; Titanium compounds; Transistors;
Conference_Titel :
Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on
Conference_Location :
Rome
Print_ISBN :
978-1-4244-3874-7
