High permittivity ferroelectric actuators for radar applications

Author

Ficklen, J. ; Weaver, J. ; Chen, C. ; Ayon, A.A.

Author_Institution

MEMS Res. Lab., Univ. of Texas at San Antonio, San Antonio, TX

fYear

2009

fDate

1-3 April 2009

Firstpage

416

Lastpage

418

Abstract

We report a new method of fabricating thermal bimorph actuators utilizing high permittivity ferroelectric thin films. This device is the first known thermal cantilever actuator employing barium titanate (BaTiO₃) for RF applications. Compared to electrostatic actuators, this MEMS structure is designed to handle high RF transmitted power while maintaining a high capacitance ratio due to the high permittivity of the ferroelectric thin film employed and without the stiction problems normally associated with other MEMS actuators.

Keywords

barium compounds; cantilevers; ferroelectric thin films; microactuators; microfabrication; micromechanical devices; permittivity; radar applications; BaTiO₃; MEMS structure; RF applications; RF transmitted power; barium titanate; capacitance ratio; ferroelectric thin films; high-permittivity ferroelectric actuators; radar applications; thermal bimorph actuators; thermal cantilever actuator; Barium; Capacitance; Electrostatic actuators; Ferroelectric materials; Micromechanical devices; Permittivity; Radar applications; Radio frequency; Titanium compounds; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on

Conference_Location

Rome

Print_ISBN

978-1-4244-3874-7

Type

conf

Filename

4919480