Title :
3D integrated sensor for biomolecules by using RF-MEMS technologies
Author :
Chien, Jui-Hung ; Chu, Yuan-Hua ; Tseng, Shau-Yin ; Yang, Cheng-Hao ; Chen, Ping-Hei
Author_Institution :
SoC Technology Center, Industrial Technology Research Institute, Taiwan, 310
Keywords :
Biosensors; Mechanical engineering; Mechanical sensors; Molecular biophysics; Printing; Publishing; Radiofrequency microelectromechanical systems;
Conference_Titel :
Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on
Conference_Location :
Rome, Italy
Print_ISBN :
978-1-4244-3874-7
