• DocumentCode
    493277
  • Title

    3D integrated sensor for biomolecules by using RF-MEMS technologies

  • Author

    Chien, Jui-Hung ; Chu, Yuan-Hua ; Tseng, Shau-Yin ; Yang, Cheng-Hao ; Chen, Ping-Hei

  • Author_Institution
    SoC Technology Center, Industrial Technology Research Institute, Taiwan, 310
  • fYear
    2009
  • fDate
    1-3 April 2009
  • Firstpage
    60
  • Lastpage
    60
  • Keywords
    Biosensors; Mechanical engineering; Mechanical sensors; Molecular biophysics; Printing; Publishing; Radiofrequency microelectromechanical systems;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on
  • Conference_Location
    Rome, Italy
  • Print_ISBN
    978-1-4244-3874-7
  • Type

    conf

  • Filename
    4919481
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=493277