Title :
Offset compensation of integrated thermal flow sensors by means of split heater microstructures
Author :
Bruschi, P. ; Dei, M. ; Piotto, M.
Author_Institution :
Dipt. di Ing. dell´´Inf., Univ. di Pisa, Pisa
Abstract :
The effectiveness of a new offset compensation technique for integrated thermal flow meters is demonstrated. A sensor structure based on two heaters placed between two temperature probes is designed with a commercial CMOS process and fabricated by means of a post-processing technique. The power unbalance between the two heaters is used to compensate the intrinsic sensor offset. Experiments, performed in nitrogen at different temperatures, confirm the reduction of both offset and its temperature drift by nearly one order of magnitude.
Keywords :
CMOS integrated circuits; compensation; flow sensors; probes; temperature sensors; CMOS process; integrated thermal flow sensor; offset compensation; post-processing technique; split heater microstructure; temperature drift; temperature probe design; Electronic packaging thermal management; Fluid flow; Gas detectors; Microstructure; Nitrogen; Probes; Temperature distribution; Temperature sensors; Thermal sensors; Voltage;
Conference_Titel :
Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on
Conference_Location :
Rome
Print_ISBN :
978-1-4244-3874-7
