Title :
A clover shaped silicon piezoresistive microphone for miniaturiz Photoacoustic Gas sensors
Author :
Grinde, C. ; Ohlckers, P. ; Mielnik, M. ; Jensen, G.U. ; Ferber, A. ; Wang, D.T.
Author_Institution :
Vestfold Univ. Coll., Tonsberg
Abstract :
Here we present the design and modeling of a novel piezoresistive microphone designed for a photoacoustic gas sensor system. The microphone is fabricated using a novel process to enable DRIE etch through of membranes of multiple thickness.
Keywords :
elemental semiconductors; gas sensors; microphones; piezoresistive devices; silicon; DRIE etch; Si; miniaturized photoacoustic gas sensors; piezoresistive microphone; Gas detectors; Microphones; Piezoresistance; Silicon;
Conference_Titel :
Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on
Conference_Location :
Rome
Print_ISBN :
978-1-4244-3874-7
