Fabrication of internal driven micro centrifugal force pump based on synchronous micro motors with polymer magnet rotors

In this paper the fabrication of a micro centrifugal force pump based on a synchronous motor is presented. The pump unit as well as the electromagnetic drive unit is fully integrated and mainly realized by means of micro fabrication technologies including UV-depth lithography and electroplating. Furthermore, one specialty is the application of polymer magnets which allow a miniaturization of the toothed rotor down to 2 mm. The presented pump reveals a promising basic concept for other micro rotary pumps like spiral, impeller or gear pumps.