Title :
What happens turning a 250µm thin piezo-stack sideways? An experimental and analytical approach to one-side-actuated piezoelectric micro drives, regarding electrode layouts and directions of deflection
Author :
Zähringer, Sandy ; Schwesinger, Norbert
Author_Institution :
Fachgebiet fur Mikrostrukurierte Mechatronische Syst., Tech. Univ. Munchen, Munich
Abstract :
This paper leads to a one-side-actuated piezoelectric membrane showing an upward deflection under forward bias. It is also shown that one-side-actuated piezoelectric membranes achieve comparable and higher deflections as common bimorph structures with similar dimensions. The piezoelectric substrate functions as complete active element, since it is both actuator and deflectable membrane.
Keywords :
electrodes; membranes; micromechanical devices; piezoelectric actuators; bimorph structures; electrode layouts; forward bias; one-side-actuated piezoelectric membrane; one-side-actuated piezoelectric membranes; one-side-actuated piezoelectric micro drives; piezoelectric substrate functions; upward deflection; Assembly; Biomembranes; Ceramics; Contacts; Electrodes; Forward contracts; Piezoelectric actuators; Piezoelectric effect; Piezoelectric polarization; Turning;
Conference_Titel :
Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on
Conference_Location :
Rome
Print_ISBN :
978-1-4244-3874-7
