Title :
A MEMS-based multi-sensor system for attitude determination
Author :
Alandry, Boris ; Dumas, Norbert ; Latorre, Laurent ; Mailly, Frederick ; Nouet, Pascal
Author_Institution :
Univ. Montpellier II, Montpellier
Abstract :
This paper presents an original multi-sensor system for 3D orientation determination based on only 4 MEMS sensors. MEMS sensors are manufactured on a cheap standard technology from NXP Semiconductors using TMAH front side wet etching with no additional masking step. This very low cost manufacturing process makes the system suitable for various consumer applications. Electronic architecture for signal conditioning is detailed covering issues regarding the design of piezoresistor based systems (offsets, flicker noise...). Finally, the complete system has been prototyped proving the interest and the feasibility of such devices.
Keywords :
attitude measurement; etching; microsensors; piezoresistive devices; resistors; sensor fusion; 3D orientation determination; MEMS-based multisensor system; TMAH front side wet etching; attitude determination; electronic architecture; piezoresistor design; 1f noise; Costs; Manufacturing processes; Micromechanical devices; Piezoresistance; Position measurement; Semiconductor device manufacture; Sensor systems; Signal design; Wet etching;
Conference_Titel :
Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on
Conference_Location :
Rome
Print_ISBN :
978-1-4244-3874-7
