MEMS multi-physics approach design and fabrication for electrical metrology applications

This paper present results of work undertaken for exploring MEMS capabilities to fabricate AC voltage references for electrical metrology and high precision instrumentation through the mechanical-electrical coupling in MEMS devices. Several first devices have been designed and fabricated using a Silicon On Insulator (SOI) Surface Micromachining process. The measured MEMS AC voltage reference values have been found to be from 5 V to 100 V in a good agreement with the calculated values performed with Coventor and Comsol finite elements software. These tests structures have been used to develop the read-out electronics to drive the MEMS and to design a second set of devices with improved characteristics.