Title :
Reliability of RF MEMS switches due to charging effects and their circuital modelling
Author :
Marcelli, Romolo ; Bartolucci, Giancarlo ; Papaioannu, George ; De Angelis, Giorgio ; Lucibello, Andrea ; Proietti, Emanuela ; Margesin, Benno ; Giacomozzi, Flavio ; Deborgies, François
Author_Institution :
CNR-IMM Roma, Rome
Abstract :
The reliability of RF MEMS switches is typically reduced by charging effects occurring in the dielectrics. The aim of this paper is to discuss these effects, and to propose an equivalent circuit model which accounts for most of the physical contributions present in the structure.
Keywords :
dielectric devices; equivalent circuits; microswitches; microwave switches; semiconductor device models; semiconductor device reliability; RF MEMS switches; charging effects; dielectrics; equivalent circuit model; reliability; Bridge circuits; Dielectrics; Equivalent circuits; Polarization; Radiofrequency microelectromechanical systems; Solid state circuits; Space charge; Switches; Switching circuits; Voltage control;
Conference_Titel :
Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on
Conference_Location :
Rome
Print_ISBN :
978-1-4244-3874-7
