• DocumentCode
    493341
  • Title

    Design and development of a latching micro optical switch

  • Author

    Garcia, Ernest J. ; Polosky, Marc A. ; Swiler, Thomas P. ; Shul, Randy J. ; Luck, David L.

  • fYear
    2009
  • fDate
    1-3 April 2009
  • Firstpage
    353
  • Lastpage
    358
  • Abstract
    We will review the initial design and development of a first-of-its-kind latching micro optical switch that can be switched from one optical state to another utilizing thermal actuation. The device is designed to remain in one position or the other without the requirement for continuous external power to keep the switch in either state. The switch uses deep reactive ion etching to form the necessary structures required to move optical fibers from one position to another.The switch is designed to align a movable optical fiber with a fixed optical fiber to perform an optical switching function. Only momentary pulses of power are required to move the optical fiber from one position to another. The device uses a latching mechanism fabricated in silicon-on-insulator material (SOI) to hold the optical fiber in either of its two desired states (aligned or out-of-alignment). We are in the process of developing this switch to meet stringent environmental requirements such as shock, vibration and temperature excursions for a number of applications. While this device is not a high speed switch, it is being developed to provide capability for extreme environment use such as that encountered in space or in airborne applications. Our initial results have been excellent; we have successfully designed, fabricated and tested a functioning latching micro optical switch that holds great promise for extreme environment applications.
  • Keywords
    flip-flops; micro-optomechanical devices; microswitches; optical fibres; optical switches; silicon-on-insulator; sputter etching; SOI; Si; deep reactive ion etching; latching; microoptical switch; optical fibers; silicon-on-insulator material; thermal actuation; Etching; High speed optical techniques; Optical design; Optical fibers; Optical materials; Optical pulses; Optical switches; Particle beam optics; Silicon on insulator technology; Ultraviolet sources;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on
  • Conference_Location
    Rome
  • Print_ISBN
    978-1-4244-3874-7
  • Type

    conf

  • Filename
    4919546