DocumentCode
493355
Title
Silicon carbide as a material for biomedical microsystems
Author
Zorman, Christian A.
Author_Institution
Dept. of Electr. Eng. & Comput. Sci., Case Western Reserve Univ., Cleveland, OH
fYear
2009
fDate
1-3 April 2009
Firstpage
1
Lastpage
7
Abstract
Silicon Carbide (SiC) is emerging as an enabling material for biomedical microsystems due to its unique combination of electrical, mechanical and chemical properties combined with its compatibility with Si micromachining techniques. This paper presents an overview of the latest advancements in this area including on-going research to develop SiC for biosensing, bio-microdevice packaging, bio-filtering, biomedical imaging and other related biomedical applications.
Keywords
bioMEMS; biomedical imaging; biomedical measurement; biosensors; micromachining; microsensors; semiconductor device packaging; silicon; wide band gap semiconductors; SiC; bio-filtering device; bio-microdevice packaging; biomedical imaging; biomedical microsystems; biosensing device; micromachining; silicon carbide material; Biological materials; Biomedical materials; Chemicals; Crystallization; Mechanical factors; Micromachining; Micromechanical devices; Semiconductor films; Silicon carbide; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Test, Integration & Packaging of MEMS/MOEMS, 2009. MEMS/MOEMS '09. Symposium on
Conference_Location
Rome
Print_ISBN
978-1-4244-3874-7
Type
conf
Filename
4919560
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